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0242-36515 RTP XE Chamber Temperature Match KitversusSteag / AST 2800 RTP

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Mattson Steag / AST 2800 RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMattson
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Mattson Steag
Specifications
Configuration—Missing parts[1]
Phase—3 Phase[2]
Frequency—50 Hz[2]
Voltage—208V[2]
Model—2800[1]
Make—Mattson / Steag / AST[1]
Asset #—83206[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing