Waferpedia

Comparison ledger

0041-39086 ESC Partversus810

Applied Materials 0041-39086 ESC Part, EV Group 810, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
810EV Group
OEMApplied MaterialsEV Group
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—EV Group 810
Specifications
Listed function—Plasma Activation[1]
Tool category—Plasma Etching and Cleaning[1]
Model designation—EVG 810[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu