Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura I DPS Poly

Applied Materials 0041-39086 ESC Part, Applied Materials Centura I DPS Poly, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura I DPS PolyApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
Configuration—2x DPS Poly Chambers[1]
Phase—3 Phase[1]
Voltage—208 Vac[1]
Wafer Size—8 inch[1]
Chambers—2x DPS Poly Chambers[1]
RF Generators—Advanced Energy RF 5S and RF 20 RWC 2000[1]
Power—3 Phase, 4 Wire, 208 Vac, 50/60 Hz[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing