Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura 5300 Omega HDP Dry

Applied Materials 0041-39086 ESC Part, Applied Materials Centura 5300 Omega HDP Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura
Specifications
2 ch—SiO2 D/E CH-A/B[1]
Manufacturer—Applied Materials[1]
Model—Centura 5300 Omega HDP[1]
Tool type—Dry etcher[1]
Wafer size—8 inch[1]
Configuration—2 ch SiO2 D/E CH-A/B[2]

Plan your fab

Building a Etch process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com