Waferpedia

Comparison ledger

0041-39086 ESC PartversusCentura 5200 MXP+ SOG

Applied Materials 0041-39086 ESC Part, Applied Materials Centura 5200 MXP+ SOG, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Centura 5200 MXP+ SOGApplied Materials
OEMApplied MaterialsApplied Materials
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Applied Materials Centura 5200 MXP+ SOG
Specifications
Wafer Size—8 inch[1]
Process Type—SOG (Spin-On Glass) Etch[1]
Chamber Configuration—MXP+[1]
Vintage Year—1996[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing