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Comparison ledger

0021 32427 Partversus253B-20-40-2

Applied Materials 0021 32427 Part, YES 253B-20-40-2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 32427 PartApplied Materials
OEMApplied MaterialsYES
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 32427 PartYES 253B-20-40-2
Specifications
ConfigurationCooling Plare, Countermatch,300mm Produc[1]—
Model—253B-20-40-2[2]
Type—Exhaust Throttle Valve[2]
Valve mechanism—butterfly valve[2]
Controller compatibility—Type 651, 652, 152G, or 252 (revision D or later) controllers[2]
Flange types available—ASA, KF Style ISO, NW Style ISO, CF, and JIS[2]
Inside diameter—0.779 in (19.8 mm)[2]
Mounting flange—KF-40[2]
Outside diameter—2.75 in (69.9 mm) unheated; 3.00 in (76.2 mm) with heater option[2]
Controllable conductance—0.25 to 31 l/sec[2]
Closed leakage—<10^-7 Torr l/sec[2]
Flapper seal—None[2]
Thickness—2.25 in (57.2 mm)[2]
Overall height—8.64 in (219.5 mm) unheated; 8.81 in (223.8 mm) with heater option[2]
Number of bolt holes—N/A[2]
Bolt hole diameter—N/A[2]
Bolt circle diameter—N/A[2]
Flange O-ring groove ID—N/A[2]
Valve body operating temperature—0° to 90° C (32° to 194° F) max.[2]
Valve motor ambient operating temperature—0° to 70° C (32° to 158° F) max.[2]
Speed (open to close)—7.5 sec[2]
Power input—±15 VDC, 1 Amp (30 Watts) nominal, user-supplied[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu