Waferpedia

Comparison ledger

0020 17485 PartversusMark 50 E-Beam

Applied Materials 0020 17485 Part, CHA Mark 50 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 17485 PartApplied Materials
OEMApplied MaterialsCHA
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 17485 PartCHA Mark 50
Specifications
ConfigurationStrap, RF Out 2 Balanced Coil Match, Hdp[1]110 / 220 Vac[2]
Phase—3 Phase[2]
Frequency—50 Hz[2]
Power Supply—3 Phase, 110/220 Vac, 50 Hz[2]
Wires—5[2]
Compressor—CTI 9700 A[2]
E-Beam Power Supply—Ulvac HPS 1000 F[2]
Transformer—IMAI NT 3 X[3]
CHA SR 10—Included[3]
Vintage—2016[2]
Compatibility—Class A and B Metals and Compounds[4]
Restrictions—No high vapor pressure materials; no oxide evaporation[4]
Voltage—110/220 Vac[2]
Vintage Year—2016[2]
Location (CNF)—Room 110[4]
Category—E-Beam Evaporator[5]
Electrical Specifications—3 Phase - 110 / 220 Vac - 50 Hz - 5 Wires[2]
Additional Components—CHA SR 10 - IMAI NT 3 X Transformer[3]
Class Compatibility—5 - Class A and B Metals and Compounds[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]cnfusers.cornell.educnfusers.cornell.edu
  5. [5]Equipment inventory listing