Waferpedia

Comparison ledger

0020 12458 PartversusIntegra RS

Applied Materials 0020 12458 Part, Axcelis Integra RS, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
Integra RSAxcelis
OEMApplied MaterialsAxcelis
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartAxcelis Integra RS
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]—
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]Integra RS[2]
Manufacturer—Axcelis[2]
Process type—CVD (Chemical Vapor Deposition)[2]
Vintage—2012[2]
Application—Production of 3x nm and below NAND Flash devices[3]
Platform—single, modular wafer handling platform[3]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]prnewswire.comprnewswire.com