Comparison ledger
Applied Materials 0010 47763, Tegal i90X, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010 47763Applied Materials | i90XTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | Windows NT |
| Generation | — | — |
| Family | Applied Materials 0010 47763 | Tegal i90X |
| Specifications | ||
| Configuration | 2nd Source New[1] | — |
| Type | Monopolar Dual Heated[2] | — |
| Description | ASSY, ESC, BONDED, MONOPOLAR DUAL HEATED[3] | — |
| Possible Materials | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Model | 0010-47763[1] | — |
| OEM | Applied Materials[1] | — |
| Material (possible) | Al2O3 (aluminum oxide) or AlN (aluminum nitride)[2] | — |
| Application | Fixing wafers in etching process (PVD, CVD, ETCH)[2] | — |
| Quantity available (source) | 1[2] | — |
| Technology | — | plasma etch technology[4] |
| Platform | — | based on the robust, production-proven platform of the 900 series[4] |
| Footprint | — | no increase in footprint[4] |
| Recipes | — | unlimited recipes[4] |
| Recipe editor | — | easy to use screen recipe editor[4] |
| Stabilization step | — | configurable, faster stabilization step[4] |
| Overetch step | — | programmable percent overetch step[4] |
| Set-point control | — | 20X fine set-point control for pressure, RF and gas flows[4] |
| Transport | — | improved, smooth, faster transport[4] |
| Stepper motors | — | high-resolution stepper motors[4] |
| Motor drivers | — | intelligent micro-stepping motor drivers[4] |
| Data logging | — | default or user-defined values and polling rates; downloadable files to disk or CD; on-screen real time and historical trending; unlimited access to every system I/O data point; additional I/O available for expansion[4] |
| User interface | — | GUI touch screen human interface; on-screen end-point trace; I/O screen read-out; on-screen alarm logging; lot and wafer ID[4] |
| Control system | — | programmed logic controller (PLC) for input/output speed and expansion; interface board connects to all existing sensors for troubleshooting and maintenance[4] |
| Control computer | — | Windows NT, Pentium II 130MB RAM, 230 MHz clock, 6GB hard drive available[4] |
| Integrated PC | — | industrial strength integrated PC/touchscreen[4] |
| Removable media | — | read-write CD and 3.5 floppy disk[4] |
| Process steps | — | Configurable, faster stabilization step; programmable percent overetch step[4] |
| Wafer transport | — | High-resolution stepper motors; intelligent micro-stepping motor drivers[4] |
| I/O control | — | Programmable logic controller (PLC) for I/O speed and expansion; interface board connects to all existing sensors[4] |
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