Comparison ledger
Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated, EV Group EV 501 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-47763 ASSY ESC Bonded Monopolar Dual HeatedApplied Materials | EV 501 WaferEV Group |
|---|---|---|
| OEM | Applied Materials | EV Group |
| Category | Packaging & Bonding | Packaging & Bonding |
| Wafer size | — | Capable of thermo compression, fusion or anodic wafer bonding |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-47763 ASSY ESC Bonded Monopolar Dual Heated | EV Group EV 501 Wafer |
| Cited variants | — |
|
| Specifications | ||
| Configuration | Refurbished[2] | Refurbished[3] |
| Wafer size | — | Capable of thermo compression, fusion or anodic wafer bonding[3] |
| Thickness | — | Max wafer stack thickness 6 mm[3] |
| Bottom side heater | — | 550°C max. in 1°C steps[3] |
| Temperature uniformity | — | ± 1,5 %[3] |
| Bonding capability | — | Capable of thermo compression, fusion or anodic wafer bonding[3] |
| Bond chamber | — | Bond chamber for small pieces up to 150 mm wafers (with correct tooling)[3] |
| Vacuum pump | — | Turbo Pump[3] |
| Power supply | — | High voltage power supply for anodic bonding (additional tooling may be required)[3] |
| Electronics | — | Electronics Rack[3] |
| Control/software | — | Computer & Software[3] |
| Display | — | LCD Monitor[3] |
| Pump | — | Roughing Pump[3] |
| Manual | — | Operations Manual[3] |
| Condition | — | Refurbished[3] |
| Wafer sizes supported | — | 2, 3, 4, 5, 6, 12 inch[3] |
| Max wafer stack thickness | — | 6 mm[3] |
| Bottom side heater max temperature | — | 550°C max.[3] |
| Heater temperature step | — | 1°C steps[3] |
| Roughing pump | — | Roughing Pump[3] |
| High voltage power supply | — | High voltage power supply for anodic bonding (additional tooling may be required)[3] |
| Electronics rack | — | Electronics Rack[3] |
| Computer & software | — | Computer & Software[3] |
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