Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Ulvac Enviro Downstream Microwave, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Ulvac |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Ulvac Enviro Downstream Microwave |
| Specifications | ||
| Make | Applied Materials[1] | — |
| Model | 0010-22161[1] | Enviro[3] |
| Description | HTESC PH 1 REV A[2] | — |
| Condition | Used[2] | — |
| Stock Number | BM6628[2] | — |
| Equipment type | — | Downstream Microwave Asher[3] |
| Wafer size | — | 8 inch[3] |
| Configured wafer size | — | 6 inch wafers[4] |
| System configuration | — | Single Chamber Advanced Strip System[4] |
| Included component | — | Computer[4] |
| Included documentation | — | Manuals[4] |
| Year | — | 2004[5] |
| OEM | — | Ulvac[3] |
| Wafer sizes | — | 8 inch[3] |
| System type | — | Single Chamber Advanced Strip System[4] |
| RF generator | — | ENI OEM-6B RF Generator[4] |
| MFCs | — | 5[4] |
| Robot | — | Brooks Robot[4] |
| Pump/Blower | — | Edwards IQ Pump/Blower[4] |
| Manuals | — | Included[4] |
| Type | — | Downstream Microwave Asher[3] |
| Chamber | — | Single[4] |
| Wafer Size | — | 8 inch (supported)[3] |
| RF Generator | — | ENI OEM-6B[4] |
| Mass Flow Controllers | — | 5[4] |
| Computer | — | Included[4] |
| Year of unit | — | 2004[6] |