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0010-22161 High EFF RF MatchversusAct 12

Applied Materials 0010-22161 High EFF RF Match, Tokyo Electron Act 12, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Act 12Tokyo Electron
OEMApplied MaterialsTokyo Electron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchTokyo Electron Act 12
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—2Coater 2B.L.Cot 4Developer[3]
Wafer Size—8 inch[7]
Vintage—2003
Coaters & Developers Vintage—2002
Number of Coater Modules—2[3]
Number of Bottom-Layer Coat Modules—2[3]
Number of Developer Modules—4[3]
Sources (7)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing