Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusATS 195 V 5-5 LN 2

Applied Materials 0010-22161 High EFF RF Match, Thermotron ATS 195 V 5-5 LN 2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsThermotron
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchThermotron ATS 195
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Max Load—46 A[3]
Largest Motor—5 HP, 807 A[3]
Configuration—LN2 Cooled[3]
Cold / Hot Compartment—-73 to 177 Celsius[3]
Hot Compartment—- ambient to 200 Celsius[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing