Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusINR 498 012 D X 007 Thermo Chiller

Applied Materials 0010-22161 High EFF RF Match, SMC INR 498 012 D X 007 Thermo Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsSMC
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchSMC INR 498 012 D X 007 Thermo Chiller
Specifications
MakeApplied Materials[1]SMC[3]
Model0010-22161[1]INR 498 012 D X 007[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Part number—INR-498-012D-X007[4]
Part name—Chiller, H2000 DNET Heat Exchanger[4]
Controller model—P49823068#1[5]
Pump—Sanso PV4-6/6-DTBSC3[5]
Heat exchanger—SWEP B25Hx16/1P-SN-S[5]
Country/Region of manufacture—Japan[6]
Length—80 cm[6]
Width—40 cm[6]
Height—40 cm[6]
Weight—~120 kg[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]Equipment inventory listing
  4. [4]semiconservice.comsemiconservice.com
  5. [5]td7studios.comtd7studios.com
  6. [6]novusferro.comnovusferro.com