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0010-22161 High EFF RF MatchversusTMH 1001 SG Turbo

Applied Materials 0010-22161 High EFF RF Match, Pfeiffer TMH 1001 SG Turbo, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPfeiffer
Category——
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FamilyApplied Materials 0010-22161 High EFF RF MatchPfeiffer TMH
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—DN 200 ISO-K, 3P[3]
Oil—TL011 65 ml[3]
S(N2)—880 l/s[3]
Mass—40 kg[3]
Pumping Speed (Nitrogen)—880 l/s[3]
Inlet Flange—DN200 ISO-K[3]
Oil Type—TL011[3]
Oil Volume—65 ml[3]
Vintage—1997[3]
Motor Phase—3P[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing