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Comparison ledger

0010-22161 High EFF RF Matchversus11 067 Ion Gun Control

Applied Materials 0010-22161 High EFF RF Match, Perkin Elmer 11 067 Ion Gun Control, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsPerkin Elmer
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchPerkin Elmer 11 067 Ion Gun Control
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Beam voltage range—0 to +5000 volts DC[3]
Focus ratio—70-100% of beam voltage[3]
Minimum focus voltage—100 volts DC[3]
Raster amplitude—0 to +200 volts peak-to-peak[3]
Pressure range—0-50 mP[3]
Anode current—25 uA at 50 mP[3]
Output current—50 mA[3]
Stability—1% per hour[3]
Ripple—0.2 V peak-to-peak[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]engineering.purdue.eduengineering.purdue.edu