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0010-22161 High EFF RF MatchversusSEZ 201

Applied Materials 0010-22161 High EFF RF Match, Lam Research SEZ 201, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
SEZ 201Lam Research
OEMApplied MaterialsLam Research
Category——
Wafer size——
Process node——
Introduced——
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FamilyApplied Materials 0010-22161 High EFF RF MatchLam Research SEZ 201
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]SEZ 201[5]
DescriptionHTESC PH 1 REV A[2]Wafer Backside etcher with 2 x SMIF[5]
ConditionUsed[2]—
Stock NumberBM6628[2]—
Equipment type—Wafer backside etcher[3]
Manufacturer designation—Lam / SEZ[4]
Category—Etch[3]
Wafer size—8 inch[3]
Version—200mm[5]
Configuration & options—2 SM[3]
Manufacturer—Lam Research[3]
Tool type—Backside etcher[3]
Configuration—3 2 SM[3]
SMIF—2 x SMIF[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]fabsurplus.comfabsurplus.com