Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards IXL 1000 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | IXL 1000 DryEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards IXL 1000 Dry |
| Cited variants | — |
|
| Specifications | ||
| Make | Applied Materials[2] | Edwards[4] |
| Model | 0010-22161[2] | IXL 1000[4] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Peak speed | — | 930 m3/h / 547 cfm / 15500 l/min[1] |
| Ultimate pressure (typical) | — | 0.001 mbar / 0.00075 Torr / 0.1 Pa[1] |
| Power at ultimate | — | 1 kW[1] |
| Inlet connection | — | ISO100[1] |
| Outlet connection | — | NW25[1] |
| Cooling water connection | — | 3/8 in Quick Connect[1] |
| Nitrogen connection | — | n/a or 1/4 in tube fitting[1] |
| Water flow | — | 1.6 l/min[1] |
| Typical purge flow | — | 0 slm or 0-40 slm (default 10)[1] |
| Weight | — | 167 kg or 168 kg[1] |
| Noise | — | 55 dB(A)[1] |
| Supply voltage and frequency | — | 200-460 V, 50/60 Hz[1] |
| Power in Green Mode | — | 0.05 kW[1] |
| Green Mode energy reduction | — | up to 96% during idle periods[1] |
| Footprint | — | 0.195 m2[1] |