Comparison ledger
Applied Materials 0010-22161 High EFF RF Match, Edwards iH 1000 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-22161 High EFF RF MatchApplied Materials | iH 1000 DryEdwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1990– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-22161 High EFF RF Match | Edwards iH 1000 Dry |
| Cited variants | — | |
| Specifications | ||
| Make | Applied Materials[2] | — |
| Model | 0010-22161[2] | iH 1000[4] |
| Description | HTESC PH 1 REV A[3] | — |
| Condition | Used[3] | — |
| Stock Number | BM6628[3] | — |
| Manufacturer | — | Edwards[4] |
| Product type | — | Dry pump[5] |
| Inlet connection | — | ISO 100[6] |
| Outlet connection | — | KF 40[6] |
| Pumping speed | — | 560 cfm[6] |
| Ultimate pressure | — | 1.5x10-3 Torr[6] |
| Motor | — | 3 Phase, 208V, 50/60Hz[5] |
| Weight | — | 948 lbs[5] |
| Voltage / frequency | — | 200-208 V, 50/60 Hz[6] |
| Power input | — | 3.5 kW[6] |
| Rated motor power | — | 5.1 kW[6] |
| Oil capacity | — | 1.48 l[6] |
| Dimensions | — | 909 x 839 x 390 mm[5] |