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0010-22161 High EFF RF MatchversusCentura 5200 DXZ

Applied Materials 0010-22161 High EFF RF Match, Applied Materials Centura 5200 DXZ, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Centura 5200 DXZApplied Materials
OEMApplied MaterialsApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchApplied Materials Centura 5200 DXZ
Cited variants—
  • Centura 5200 DxZ PECVD[1]
  • Centura 5200 DxZ SACVD[2]
Specifications
MakeApplied Materials[3]—
Model0010-22161[3]Centura 5200 DXZ[5]
DescriptionHTESC PH 1 REV A[4]PECVD (Chemical Vapor Deposition)[1]
ConditionUsed[4]—
Stock NumberBM6628[4]—
Wafer Size—200 mm[1]
Process Type (available)—PECVD, SACVD[1]
Number of Chambers (SACVD variant)—3[2]
Chemistry (SACVD variant)—TEOS[2]
OEM—Applied Materials[5]
Version—200 mm[1]
Vintage—01.06.1997[2]
Sources (5)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing
  4. [4]tarasemi.comtarasemi.com
  5. [5]Equipment inventory listing