Waferpedia

Comparison ledger

0010-21246 PartversusPR4000B

Applied Materials 0010-21246 Part, MKS PR4000B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
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Family—MKS PR4000B
Specifications
Type—Vacuum gauge controller[1]
Gauge support—Up to six vacuum gauges and/or mass flow controllers[1]
Communication—RS232 and RS485[1]
Control capability—Provides pressure measurement, flow, valve, and pressure control[1]
Closed-loop pressure control option—Available for use with MKS valves[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]api.p1.mks.comapi.p1.mks.com