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Comparison ledger

0010-21246 PartversusArcher 10

Applied Materials 0010-21246 Part, KLA Archer 10, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA Archer 10
Cited variants—
  • Archer 10 XT Overlay[1]
Specifications
Wafer Size—200mm[2]
Wafer Handling—200mm dual open wafer handler[2]
Measurement Technology—Coherence probe interference microscope[2]
Software—Windows NT based[2]
Integration Software—KLA Stepper Setup (KLASS) station integration software[2]
User Interface—19-inch LCD screen[2]
Network—Network ready[2]
OEM—KLA[3]
Model—Archer 10[3]
Category—Metrology & Inspection[1]
Wafer handling—200mm dual port open wafer handler[1]
Overlay measurement module—Fully automated overlay measurement module[2]
Optics—Coherence probe interference microscope[2]
Computer software—Windows NT based software and user interface[2]
Computer interface—Integrated user interface[2]
Display—19" LCD screen[2]
Storage media—3.5 inch floppy drive and CD ROM drive[2]
Connectivity—Network ready[2]
Communications—SEC's communication[2]
Software version—5.6[1]
Computer upgrade—XP computer upgrade[1]
Computer—KLASS RS2 computer[1]
Configuration options—AMS, Digitizer, LINNIK, PDA, PZT-P-Z feedback[1]
Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]classoneequipment.comclassoneequipment.com
  3. [3]Equipment inventory listing