Waferpedia

Comparison ledger

0010-21246 PartversusL116SF

Applied Materials 0010-21246 Part, Gaertner L116SF, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-21246 PartApplied Materials
L116SFGaertner
OEMApplied MaterialsGaertner
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Gaertner L116SF
Specifications
instrument type—ellipsometer[1]
use—thickness measurement of films[1]
laser—He-Ne laser, 632.8 nm[1]
incident angle—70°[1]
Sources (1)Every fact above is drawn from these public sources
  1. [1]smif.pratt.duke.edusmif.pratt.duke.edu