Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusS 8820

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 8820, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S 8820Hitachi
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi S 8820
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]HDD[2]
Measuring size—0.1-10 μm[2]
Power supply—700-1300 V[2]
Type—SEM (Scanning Electron Microscope)[2]
Wafer sizes—6 inch[2]
Vacuum / pumping—Scroll pumps not included[2]
Wafer handling—Open cassette[2]
Optics / imaging—CCD Camera[2]
Optics—FCM Objective lens system[2]
Control / software—Software[2]
Configuration / options—HDD[2]
Vintage—1996[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing