Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 7800 DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | S 7800 DR-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | — |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Resolution (standard) | — | 5 nm @ 1 kV[2] |
| High-Resolution Mode | — | 1 nm (Single Spot X/Y Mode)[2] |
| Low Magnification Resolution | — | 5 nm (W/Z Mode)[2] |
| Measurement Precision | — | Static 3 Sigma ±0.010 µm[2] |
| Positioning Accuracy (X/Y) | — | ±15 µm[2] |
| Rotation Precision | — | ±60 µm[2] |
| Pre-Alignment Accuracy (X/Y) | — | ±15 µm[2] |
| Stage Travel X | — | 0–200 mm[2] |
| Stage Travel Y | — | 0–200 mm[2] |
| Stage Travel Z | — | 4–12 mm[2] |
| Rotation (R) | — | 0–360°[2] |
| Tilt (T) | — | 0–60°[2] |
| Throughput | — | 5 wafers/hour[2] |
| Vacuum System | — | Vacuum pumps not included[2] |
| Additional Hardware | — | Chiller, Transformer[2] |
| Software | — | AutoLive Software, Automatic Beam Current Control, Automatic Sample Control, Automatic Defect Review, Automatic Navigation[2] |
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