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0010-18024 Pyrometer AssemblyversusDektak 150

Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBruker
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyBruker Dektak
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]for parts[2]
Scan Length—55mm (2.16in.)[3]
Data Points Per Scan—60,000 maximum[3]
Step Height Repeatability—6Å, 1 sigma on 1μm step[3]
Vertical Resolution—1Å max. (at 6.55μm range)[3]
Max Sample Thickness—Up to 100mm (4in.)[3]
Max Sample Size—150mm (6in.)[3]
Stage Travel—100mm (4 inches)[3]
Stage Repeatability—1μm[3]
Stage Resolution—0.5μm[3]
Stylus Radius Options—from 50nm to 25μm[3]
Camera—640 x 480-pixel, manual zoom variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)[3]
Maximum scan length—55mm (2.16in.)[3]
Maximum data points per scan—60,000[3]
Maximum sample thickness—Up to 100mm (4in.)[3]
Maximum sample size—150mm (6in.)[3]
Y automatic stage travel—100mm (4 inches), 1μm repeatability, 0.5μm resolution[3]
Film thickness measurement range—up to 1000μm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]smif.pratt.duke.edusmif.pratt.duke.edu