Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tegal T 903 E Plasma RIE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | T 903 E Plasma RIETegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | — |
| Specifications | ||
| OEM | Applied Materials[1] | Tegal[3] |
| Model | 0010-16392[1] | T 903 E[3] |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Equipment type | — | Plasma RIE (Reactive Ion Etcher)[3] |
| Category | — | Etch[4] |
| Vintage | — | 1989[3] |
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