Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Tegal 903e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | 903eTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | 75 mm to 150 mm round substrates; rectangular substrates from 100 mm to 125 mm on a side |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2000 sale announced · 2001 order announced |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Tegal 903e |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Tool type | — | diode plasma etch tool[3] |
| Substrate diameter range | — | 75 mm to 150 mm round silicon and gallium arsenide (GaAs) substrates[3] |
| Substrate format | — | rectangular substrates from 100 mm to 125 mm on a side[3] |
| Wafer/substrate capacity | — | 75 mm to 150 mm round substrates[3] |
| Rectangular substrate capacity | — | 100 mm to 125 mm on a side[3] |
| Configured form | — | "through the wall" configuration[5] |
| Application | — | etching oxide contacts[3] |
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