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0010-16392 ESC Assemblyversus2300 Microwave Strip

Applied Materials 0010-16392 ESC Assembly, Lam Research 2300 Microwave Strip, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyLam Research 2300
Specifications
OEMApplied Materials[1]—
Model0010-16392[1]2300 Microwave Strip[4]
TypeESC Assembly[1]—
Wafer Size300 mm[2]—
Electrode ConfigurationDual[2]—
Voltage—208 Vac[3]
Configuration—50/60 Hz[4]
Phase—3 Phase[3]
Manufacturer—Lam Research[4]
Category—Etch[3]
Wafer size—12 inch[4]
Frequency—50/60 Hz[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]spwindustrial.comspwindustrial.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing