Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Applied Materials Centura eMax Nitride, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Centura eMax NitrideApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Applied Materials Centura |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 2 Chamber Emax[3] |
| Gas | — | CF4, CH2F2, CHF3, Ar, O2, N2[3] |
| OS | — | AMAT Legacy[3] |
| Buffer Robot | — | HP[3] |
| Chiller 1 | — | AMAT Endura HX 18706-01[3] |
| Chiller 2 | — | Thermo Electron HX 150 106178026[3] |
| Wafer size | — | 8 inch[3] |
| Chamber configuration | — | 2 Chamber Emax; 1 Orienter/degas[3] |
| Gas chemistry | — | CF4, CH2F2, CHF3, Ar, O2, N2[3] |
| Operating system | — | AMAT Legacy[3] |
| Chamber #A | — | eMAX[3] |
| Chamber #B | — | eMAX[3] |
| Chamber #C | — | EMPTY[3] |
| Chamber #D | — | EMPTY[3] |
| Chamber #E | — | EMPTY[3] |
| Chamber #F | — | Orienter[3] |
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