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0010-13627 High Efficiency RF MatchversusHRS 200 AN 46 S Chiller

Applied Materials 0010-13627 High Efficiency RF Match, SMC HRS 200 AN 46 S Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsSMC
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-13627 High Efficiency RF MatchSMC HRS 200 AN 46 S Chiller
Specifications
ConfigurationHE, BIAS[1]—
Asset Number70430[1]—
TypeHigh Efficiency RF Match - HE, BIAS[1]—
Capacity—10 kA[2]
Current—17 A[2]
Power Supply—380-415 V, 50 Hz / 460-480 V, 60 Hz[2]
Vintage—2020[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing