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Comparison ledger

0010-03485 Magnet AssyversusB2

Applied Materials 0010-03485 Magnet Assy, YES B2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
B2YES
OEMApplied MaterialsYES
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1998 Manual revision date
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyYES B2
Cited variants—
Specifications
ConfigurationWP AL 300mm PVD[2]—
OEMApplied Materials[2]—
Model0010-03485[2]—
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]—
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Control computer—80486-based PC[1]
Operating system—MS-DOS with Windows[1]
Process types—RIE, PE, PECVD, ICP, and ECR[1]
Primary Module vacuum connection—100 mm, 160 mm (ICP), or 250 mm (ECR) diameter at the pump connection flange[1]
Process gas channels—Up to sixteen process gas channels under mass flow control, up to eight per chamber[1]
Endpoint detection—Emission spectroscopy and laser-based systems[1]
RF generator—500 Watt solid-state 13.56 MHz generator; ICP systems also include an additional 1000 Watt limited solid-state 2 MHz RF generator[1]
Sources (5)Every fact above is drawn from these public sources
  1. [1]nanofab.utah.edunanofab.utah.edu
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com