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Comparison ledger

0010-03485 Magnet AssyversusRS 55 Auto Resistivity Mapper

Applied Materials 0010-03485 Magnet Assy, KLA RS 55 Auto Resistivity Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyKLA RS 55 Auto Resistivity Mapper
Cited variants—
Specifications
ConfigurationWP AL 300mm PVD[2]RS55/TC temperature compensation configuration[1]
OEMApplied Materials[2]—
Model0010-03485[2]RS 55 Auto[7]
DescriptionMAGNET ASSY, WP AL 300MM PVD[3]—
ProcessPVD[4]—
Wafer size300mm[5]Up to 8"/200 mm wafers[1]
VersionSpares[5]—
Part Number0010-03485[2]—
ManufacturerApplied Materials[2]—
Process TypePVD (Physical Vapor Deposition)[2]—
Application (Material)Aluminum (AL)[2]—
Wafer Diameter (associated)300 mm[2]—
Equipment type—Four-point probe resistivity mapping system[1]
Wafer handling—Manual wafer handling[1]
Measurement outputs—Contour maps, 3-D plots and diameter scans[1]
Temperature compensation—Can compensate sheet resistance measurements against ambient temperature and materials[1]
Power—115V, 50/60 Hz[1]
Measurement capability—Surface resistivity measurement[6]
Software—Omni-Map Rev. 6.51 software with StatTrax[6]
Sample size—8"-wafer or below[6]
Data storage—2 GB Iomega Drive extra data storage[6]
Calibrated range—0.005 Ω to 5 MΩ, NIST traceable[6]
Probe head—One probe head with desired range included[6]
Type—Four-point probe resistivity mapping system[1]
Outputs—Contour maps, 3-D plots, and diameter scans[1]
Measurement compensation—Can compensate sheet resistance measurements against ambient temperature and materials[1]
Measurement range—Calibrated (and NIST traceable) range from 0.005Ω to 5MΩ[6]
System type—Four-point-probe resistivity mapping system[1]
Measurement—Surface resistivity measurement[6]
Probe heads—One probe head with desired range included[6]
Sources (7)Every fact above is drawn from these public sources
  1. [1]tech-semi.comtech-semi.com
  2. [2]inventory listing
  3. [3]semistarcorp.comsemistarcorp.com
  4. [4]layla-ec.comlayla-ec.com
  5. [5]fabsurplus.comfabsurplus.com
  6. [6]gsemi.comgsemi.com
  7. [7]Equipment inventory listing