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Comparison ledger

0010-03485 Magnet AssyversusRV12

Applied Materials 0010-03485 Magnet Assy, Edwards RV12, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
RV12Edwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle—Legacy
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyEdwards RV12
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]Edwards[6]
Model0010-03485[1]RV12[6]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]—
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Type—vacuum pump[5]
Model designation in manual—EDWARDS RV12 (50 HZ)[5]
Pump type—Two-stage, oil-sealed, sliding-vane vacuum pump[6]
Inlet port—NW25[6]
Outlet port—NW25[6]
Controls—Mode selector and gas-ballast control[6]
Gas-ballast positions—Closed (0), low flow (I), high flow (II)[6]
Operating temperature range—12 to 40 °C[6]
Weight without oil—26 kg / 58 lb[7]
Electrical supply—1-phase 110-120 V or 220-240 V, 50 or 60 Hz; 3-phase 200-230 V or 380-460 V, 50 or 60 Hz[7]
Motor power—450 W at 50 Hz; 550 W at 60 Hz[7]
Oil capacity—Minimum 0.65 liter; maximum 1.0 liter[7]
Recommended oil—Ultragrade 19[7]
Ultimate vacuum—2 x 10^-3 mbar / 1.5 x 10^-3 Torr in high vacuum mode with gas ballast closed[7]
Pump construction—Two-stage, oil-sealed, sliding-vane vacuum pump[6]
Inlet connection—NW25[6]
Outlet connection—NW25[6]
Maximum displacement, 50 Hz—14.2 m3h-1[6]
Maximum displacement, 60 Hz—17.0 m3h-1[6]
Maximum pumping speed, 50 Hz—12.0 m3h-1[6]
Maximum pumping speed, 60 Hz—14.2 m3h-1[6]
Noise—48 dB(A) @ 50 Hz[6]
Oil capacity maximum—1.0 liter[6]
Oil capacity minimum—0.65 liter[6]
Sources (7)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]nanofab.utah.edunanofab.utah.edu
  6. [6]idealvac.comidealvac.com
  7. [7]idealvac.comidealvac.com