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Comparison ledger

0010-03254 E ChuckversusSML 1500 25 25 Environmental

Applied Materials 0010-03254 E Chuck, Thermotron SML 1500 25 25 Environmental, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsThermotron
Category——
Wafer size——
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Family—Thermotron SML 1500 25 25 Environmental
Specifications
Configuration—Air cooled[1]
Power—480V, 3Ph, 150 Amps[2]
Type—Environmental chamber[2]
Cooling—Air cooled[2]
Temperature control—Temperature control[2]
Humidity control—Humidity control[2]
Control system—Thermotron # 8800 touch screen control[1]
Software—Separate software required[1]
Recorder—Honeywell Truline recorder[1]
Temperature protection—Over and under temperature protection[1]
Included items—Viewing window, interior light, shelf[1]
Feed-thru ports—2X 6" Dia. opposing side feed-thru ports[1]
Access door—Left side access door[1]
Temperature range—-70 to +170* C[1]
Humidity range—10% to 98%[1]
OEM—Thermotron[1]
Model—SML 1500 25 25 Environmental[1]
Dimensions I.D.—52"W x 35"D x 47"H[3]
Dimensions O.D.—74"W x 91"D x 97"H[3]
Fast ramp—Fast Ramp[3]
Condenser—Remote Air Cooled Condenser Included[3]
Interior—Stainless steel interior[3]
Shelves—2 shelves[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]lre.comlre.com