Comparison ledger
Applied Materials 0010-03254 E Chuck, Nordson Stratosphere Plasma Treatment, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Nordson |
| Category | — | — |
| Wafer size | — | Wafer kit sensor |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Nordson Stratosphere Plasma Treatment |
| Specifications | ||
| Configuration | — | E-FEM, 300mm FOUP (2), ESD[1] |
| Wafer size | — | Wafer kit sensor[1] |
| Manufacturer | — | Nordson[1] |
| Model | — | Stratosphere[1] |
| Tool family | — | Nordson Stratosphere Plasma Treatment[2] |
| Equipment type | — | Plasma Treatment System[1] |
| Process type | — | Parallel plate asher[1] |
| RF power range | — | 600 to 1000 W[1] |
| Chiller | — | Assy, Chiller, 1HP, 230V/60, 1/4"[1] |
| Vacuum | — | 16 CFM standard dry pump[1] |
| Gas delivery | — | 100 sccm MFC[1] |
| Wafer handling | — | Wafer kit sensor[3] |
| Wafer size kit | — | Wafer kit, 200/300mm hybrid[1] |
| Electrode water cooling | — | Included[1] |
| Electrode temperature sensor | — | F 3 electrode temperature sensor[1] |