Waferpedia

Comparison ledger

ATC 2036 Eversus0020 23839 Part

AJA ATC 2036 E, Applied Materials 0020 23839 Part, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 23839 PartApplied Materials
OEMAJAApplied Materials
CategoryDepositionDeposition
Wafer size15-20” adjustable length from source to wafer—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAJA ATCApplied Materials 0020 23839 Part
Specifications
Wafer size15-20” adjustable length from source to wafer[1]—
ConfigurationTemescal Multu-Pocket Rotary E-Beam Source[1]Plate, Sensor Clamp, Hdpcvd Ultima +[2]
Chamber FrontDouble hinged door with locking mechanism[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing