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BlackMagic 6versus0010-22161 High EFF RF Match

Aixtron BlackMagic 6, Applied Materials 0010-22161 High EFF RF Match, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAixtronApplied Materials
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAixtron BlackMagic 6Applied Materials 0010-22161 High EFF RF Match
Specifications
Wafer size6 inch[1]—
TypePECVD[2]—
Maximum temperature (top heater)900 °C[2]—
Maximum temperature (bottom heater)800 °C[2]—
Process pressure range4 to 6 mbar[2]—
Process gasesAr, N2[2]—
Make—Applied Materials[3]
Model—0010-22161[3]
Description—HTESC PH 1 REV A[4]
Condition—Used[4]
Stock Number—BM6628[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]arxiv.orgarxiv.org
  3. [3]Equipment inventory listing
  4. [4]tarasemi.comtarasemi.com