Waferpedia

Comparison ledger

350 Dversus160 XP

Agilent 350 D, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
350 DAgilent
160 XPVarian
OEMAgilentVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 350Varian 160 XP
Cited variants—
Specifications
ConfigurationHas run 100mm[2]—
CategoryIon Implantation[3]—
Wafer size150 mm[4]—
Machine typeHigh Current Ion Implanter[4]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]waferpedia.comwaferpedia.com