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Comparison ledger

11980 AversusOTFC 1550 Optical

Agilent 11980 A, Optorun OTFC 1550 Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11980 AAgilent
OEMAgilentOptorun
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAgilent 11980 AOptorun OTFC 1550 Optical
Cited variants—
  • OTFC-1550CBI/DBI[1]
  • OTFC-900CBI/DBI[2]
Specifications
Wavelength Range1250-1600 nm[3]—
Model—OTFC 1550[4]
Make—Optorun[4]
Vintage—2011[4]
Category—Precision Optics[5]
Series—OTFC series[1]
Description—optical coater / optical thin film coater[4]
Application—producing AR coatings and optical filters such as edge filters and band pass filters[1]
Vacuum chamber size—SUS304, φ1550mm×1800mm (H)[1]
Substrate dome size—φ1400mm[1]
Substrate dome rotation speed—10 rpm to 30 rpm (Variable)[1]
Optical film thickness control system—HOM2-R-VIS350A High-precision Optical Monitor[1]
Optical monitor wavelength range—350nm to 1100nm[1]
Crystal film thickness monitor—XTC/3 plus 6-point rotary sensor[1]
Evaporation source—EB source: 2 units[1]
Ion source—17 cm RF ion source[1]
Ultimate pressure—7.0×10^-5 Pa or lower[1]
Pump down rate—15 minutes (Atm. to 1.3×10^-3 Pa)[1]
Substrate heater—350℃ (max.)[1]
Power requirements—3-phase, 200V, 50/60Hz, 120kVA approx.[1]
Cooling water flow rate—180ℓ/min or greater[1]
Compressed air pressure—0.5MPa or greater[1]
Gross weight—10000kg approx.[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]allwin21.comallwin21.com
  2. [2]optorun.sh.cnoptorun.sh.cn
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]waferpedia.comwaferpedia.com