Waferpedia

Comparison ledger

UF 3000 EX-eversus1007

Accretech UF 3000 EX-e, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
UF 3000 EX-eAccretech
1007KLA
OEMAccretechKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAccretech UF 3000KLA 1007
Specifications
ConfigurationDual-temp DD 93K[1]—
Temperature capabilityDual-temp DD 93K[1]—
Chuck typeLow noise hot chuck[2]—
Cleaning unit size150 x 160mm[2]—
Probe card interfaceT 2000 ISS 64PARA 440mm Card[2]—
Tester interfaceMHF 6000[2]—
Interface typeGPIB, Ethernet, Remote SS UI[2]—
OptionFFU (Fan Filter Unit)[2]—
Power supplySingle Phase[2]—
Manufacturer—KLA[3]
Model—1007[3]
Description—Wafer Prober[3]
Wafer size—150 mm[3]
Convertible to 8 inch wafer size—Yes[3]
Vintage—01.06.1995[3]
Make—KLA[4]
Equipment type—Prober[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]fabsurplus.comfabsurplus.com
  4. [4]Equipment inventory listing