Comparison ledger
Accretech UF 200 S, MPI TS2000-IFE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | UF 200 SAccretech | TS2000-IFEMPI |
|---|---|---|
| OEM | Accretech | MPI |
| Category | Test & Probe | Test & Probe |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech UF 200 | MPI TS2000-IFE |
| Specifications | ||
| Air | Over 0.45 MPa[1] | — |
| Vacuum | Over -53K MPa[1] | — |
| Voltage | 208 VAC, Single Phase[1] | — |
| Frequency | 50/60Hz[1] | — |
| Wiring Configuration | 2Wire + Ground[1] | — |
| Full Load AMPS | 7.2A[1] | — |
| Main Breaker Rating | 10A[1] | — |
| Interrupt Current | 10KA A.I.C[1] | — |
| Diagram Number | FE06000[1] | — |
| Configuration | Yield Check Function[1] | — |
| Loader, Wafer Handling | Backside Holding[1] | — |
| Wafer Size | 5",6",8", Currently 8"(200mm) Configured[1] | — |
| X/Y axis | Probing Area(±120mm), Maximum Speed(200m/s)[1] | — |
| Power Consumption | Approximately 1.5kVA[1] | — |
| Air Supply Source Pressure | 0.45Mpa or more[1] | — |
| Manipulator | MHF300L[1] | — |
| Weight (Main Body) | 900kg (Standard)[1] | — |
| Make | Accretech / TSK[2] | — |
| Model | UF 200 S[2] | — |
| Wafer Sizes | 8 inch[2] | — |
| HOT Chuck | Present[1] | — |
| GPIB Interface | Present[1] | — |
| Yield Check Function | Present[1] | — |
| FAIL Check Function | Present[1] | — |
| Base tool | — | MPI TS2000-IFE 200-mm automated probe station[4] |
| Precision | — | micron precision[4] |
| Probe types in standard configuration | — | two RF probes of GSG, GSSG or GSGSG types[4] |
| Included instruments | — | microscope and digital camera[4] |
| Thermal chuck temperature range | — | -60°C to +200 °C[4] |
| Motion/control | — | probes, microscope, and chuck are automatically controlled in x, y, and z directions with optical feedback[4] |
| RF VNA | — | Anritsu 4-Port ME7838G vector network analyzer capable of a single sweep from 70 kHz to 220 GHz[4] |
| DC bias supply | — | up to 12 DC bias can be supplied by an Agilent 4156C probe station precision semiconductor parameter analyzer capable of +/-200 V, 0.5 A, and 100 V/us pulses[4] |
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