Comparison ledger
Accretech , Tokyo Semitsu Kogaku (TSK) UF200, SCREEN SK 80 BW-AVPE, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | , Tokyo Semitsu Kogaku (TSK) UF200Accretech | SK 80 BW-AVPESCREEN |
|---|---|---|
| OEM | Accretech | SCREEN |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Transfer Robot x 1 (1 Block System) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Accretech , Tokyo Semitsu Kogaku (TSK) UF200 | SCREEN SK 80 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Transfer Robot x 1 (1 Block System)[2] |
| Date of Manufacture | 1998[1] | — |
| Currently Configured for | 200mm[1] | — |
| Current Equipment Status | Available[1] | — |
| Available date | Currently Available[1] | — |
| Equipment category | Production Wafer Prober[1] | — |
| Process | — | Photo[2] |
| Configuration | — | 4 Cassette Loading Port[2] |
| Cassette Index Station | — | 4 Side Loading[2] |
| PR Resist Pump | — | Iwaki Bellows Pump 4 Set Per 1 Spin Unit[2] |
| Wafer Flow Direction | — | Right to Left[2] |
| Voltage | — | 100V, 3.5 kW[3] |
| Main Body | — | CCD, ETU, TCU, Power Unit (USA)[3] |