Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Seren HR 601, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HR 601Seren | |
|---|---|---|
| OEM | ABM | Seren |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Seren HR 601 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| PN | — | 9601090003[3] |
| Configuration | — | Single Phase[3] |
| Input | — | 200-240 Vac, 47-63Hz[3] |
| Output | — | 600W @13.56MHz[3] |
| Forward Power Output | — | 600 Watts[4] |
| Frequency (standard) | — | 13.56 MHz[5] |
| Frequency options | — | 1.7-2.1 MHz, 12.56 MHz, 13.56 MHz, 27.12 MHz, 40.68 MHz, 60.00 MHz[6] |
| Forward Power Accuracy | — | ±2%[4] |
| Harmonics | — | -50 dBc[4] |
| Input Power | — | 100-240 VAC, 47-63 Hz, Single Phase[6] |
| Output Connector | — | Type N Female[4] |
| Interface Connectors | — | Serial: DB-9 Female; Analog: DB-25 Female[4] |
| Pulsing | — | 10 μs minimum pulse width, 0-100% duty cycle[6] |
| Cooling | — | Forced air, 153 CFM (72.2 L/s)[6] |
| Dimensions (H x W x D) | — | 5.22" x 9.47" x 20.09" (13.26 x 24.05 x 51.02 cm)[6] |
| Weight | — | 18 lbs (8.16 kg)[4] |
| Part Number (PN) | — | 9601090003[3] |
| CE Marked | — | Yes[3] |