Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Maury Microwave MT 981 B Automated Tuner, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MT 981 B Automated TunerMaury Microwave | |
|---|---|---|
| OEM | ABM | Maury Microwave |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Maury Microwave MT 981 |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Configuration | — | 0.4 - 4.0 GHz[3] |
| Frequency range | — | 0.40 - 4.0 GHz[3] |
| Type | — | Automated tuner[3] |
| Use | — | Impedance matching; source pull, load pull, and noise characterization measurements[1] |
| Connector | — | Precision 14mm (Maury MPC14)[1] |
| Matching range | — | 15:1 minimum VSWR matching capability; typically 20:1 minimum matching range[1] |
| Controller requirement | — | Must be used with MT986 series controllers with high speed motor drive option[1] |
| Accessories provided | — | One MT982C tuner cable, two 2607A coaxial 14mm to 7mm adapters, and one operating manual[1] |
| Power handling | — | 100 W CW, 1 kW peak at 10:1 matching range[1] |
| VSWR | — | 1.05 maximum based on probes retracted[1] |
| Loss | — | 0.3 dB maximum based on probes retracted[1] |
| Repeatability | — | 50 dB minimum between any two measurements at any position within the specified matching range[1] |
| Step size, probes | — | 62.5 microinches[1] |
| Step size, carriage | — | 786 microinches[1] |
| Position accuracy | — | ±1 step[1] |
| Length | — | 23.03 in (58.60 cm)[1] |