Comparison ledger
ABM -407B-2-S-CE-S293 Robot, ESPEC BTZ 175, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BTZ 175ESPEC | |
|---|---|---|
| OEM | ABM | ESPEC |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | ESPEC BTZ 175 |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | BTZ 175[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Temperature Range | — | -123°C - 304°C[2] |
| Full Load Amp | — | 14[3] |
| Largest Motor FLA | — | 3.7[2] |
| Maximum Capacity Allowed | — | 20[2] |
| Make | — | ESPEC[2] |
| Product family | — | Criterion benchtop chamber[4] |
| Temperature range | — | -123°C to 304°C[2] |
| Interior volume | — | 1.5 cu. ft. (42 liters)[4] |
| Interior dimensions | — | 19.6" x 11" x 12" (500 x 280 x 300 mm)[4] |
| Exterior dimensions | — | 30.25" x 33.5" x 34" (770 x 850 x 865 mm)[4] |
| Average change rate | — | 5°C/min (empty, per IEC 60068 3-5, at supply sensor)[4] |
| Power | — | 208/230V 1ph 60Hz (NEMA 6-20 plug) 20 Service Amps[4] |
| Heat to room | — | 9,000 BTU/Hr.[4] |
| Maximum sound level | — | 65 dBA (1 meter away)[4] |
| Temperature fluctuation | — | ±0.5°C[4] |
| Temperature gradient | — | ±1.5°C (below 100°C)[4] |