Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Edwards IXL 1000 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IXL 1000 DryEdwards | |
|---|---|---|
| OEM | ABM | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Edwards IXL 1000 Dry |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | IXL 1000[3] |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Make | — | Edwards[3] |
| Peak speed | — | 930 m3/h / 547 cfm / 15500 l/min[1] |
| Ultimate pressure (typical) | — | 0.001 mbar / 0.00075 Torr / 0.1 Pa[1] |
| Power at ultimate | — | 1 kW[1] |
| Inlet connection | — | ISO100[1] |
| Outlet connection | — | NW25[1] |
| Cooling water connection | — | 3/8 in Quick Connect[1] |
| Nitrogen connection | — | n/a or 1/4 in tube fitting[1] |
| Water flow | — | 1.6 l/min[1] |
| Typical purge flow | — | 0 slm or 0-40 slm (default 10)[1] |
| Weight | — | 167 kg or 168 kg[1] |
| Noise | — | 55 dB(A)[1] |
| Supply voltage and frequency | — | 200-460 V, 50/60 Hz[1] |
| Power in Green Mode | — | 0.05 kW[1] |
| Green Mode energy reduction | — | up to 96% during idle periods[1] |
| Footprint | — | 0.195 m2[1] |