Comparison ledger
ABM -407B-1-S-CES293 Robot, Pfeiffer DUO 20 M Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DUO 20 M VacuumPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Pfeiffer Duo |
| Cited variants | — |
|
| Specifications | ||
| Model | ABM-407B-1-S-CES293[2] | — |
| Description | ROBOT[2] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Oil | — | P3[3] |
| Max flow | — | 24.0 m³/h[3] |
| Speed | — | 1800 1/min[3] |
| Mass | — | 42.5 kg[4] |
| Configuration | — | Pump needs complete overhaul[3] |
| Pump type | — | Dual-stage, high-performance rotary vane pump[1] |
| Applications | — | Low and medium vacuum applications[1] |
| Pumping speed at 50 Hz | — | 20 m3/h[1] |
| Pumping speed at 60 Hz | — | 24 m3/h[1] |
| Flange (in) | — | DN 25 ISO-KF[1] |
| Flange (out) | — | DN 25 ISO-KF[1] |
| Operating fluid | — | P3[1] |
| Operating fluid filling | — | 1.1 l[1] |
| Rated power 50 Hz | — | 0.75 kW[1] |
| Rated power 60 Hz | — | 0.90 kW[1] |
| Rotation speed at 50 Hz | — | 1500 min-1[1] |
| Rotation speed at 60 Hz | — | 1800 min-1[1] |
| Ultimate pressure with gas ballast | — | 4 × 10^-3 hPa[1] |
| Ultimate pressure without gas ballast | — | 2 × 10^-3 hPa[1] |
| Weight | — | 44 kg[1] |
| Inlet flange | — | DN 25 ISO-KF[1] |
| Outlet flange | — | DN 25 ISO-KF[1] |
| Magnetic coupling | — | Yes[1] |
| Integrated gas ballast | — | Yes[1] |
| HV safety valve | — | Integrated[5] |
| Motor type | — | 1-phase motor[1] |
| Voltage | — | 100-110 V at 50 Hz; 100-120 V at 60 Hz[1] |